Analysis of the smoothing characteristics and shape-retaining ability of conformal vibration polishing and suppression strategy for full-spatial frequency errors of optics

Abstract

Conformal vibration polishing (CVP) employing flexible polishing tools is expected to be an efficient means of optical processing, and all current research on it is limited to planar components. Hence, the smoothing characteristics of the middle spatial frequency (MSF) errors and the ability to maintain the surface shape of different types of optics in CVP are analyzed. A combined processing method based on magnetorheological finishing and CVP for full-spatial frequency errors is proposed and verified by experiment. The peak-to-valley value, MSF errors, and surface roughness of the large-diameter component can reach 75 nm, 1.1 nm, and 0.37 nm after 9 h of processing. The research not only demonstrates the excellent removal characteristics of CVP and the effectiveness of the proposed method but also provides an additional choice for the high-precision manufacturing of optics.