Required optical characteristics of materials for phase-shifting masks
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Published:1995-08-01
Issue:22
Volume:34
Page:4923
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ISSN:0003-6935
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Container-title:Applied Optics
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language:en
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Short-container-title:Appl. Opt.
Author:
Pierrat C.,Vaidya S.
Publisher
The Optical Society
Cited by
3 articles.
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