Enhancing one dimensional sensitivity with plasmonic coupling
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference19 articles.
1. Extremely High Sensitive Plasmonic Refractive Index Sensors Based on Metallic Grating
2. Ultra-sensitive vibrational spectroscopy of protein monolayers with plasmonic nanoantenna arrays
3. Coupling between semiconductor quantum dots and two-dimensional surface plasmons
4. Fabrication and Characterization of Large, Perfectly Periodic Arrays of Metallic Nanocups
5. Multiscale patterning of plasmonic metamaterials
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1. Plasmon-assisted optical critical dimension measurement for three-layer orthogonal metallic gratings;Photonics and Nanostructures - Fundamentals and Applications;2021-09
2. Nanoscale limits of angular optical scatterometry;AIP Advances;2020-01-01
3. Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-08-14
4. Perspective: Optical measurement of feature dimensions and shapes by scatterometry;APL Materials;2018-05
5. Advanced applications of scatterometry based optical metrology;SPIE Proceedings;2017-03-28
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