Perspective: Optical measurement of feature dimensions and shapes by scatterometry
Author:
Affiliation:
1. SUNY Polytechnic Institute, College of Nanoscale Sciences, 257 Fuller Road, Albany, New York 12203, USA
2. Nanometrics, Inc., 1550 Buckeye Drive, Milpitas, California 95035, USA
Funder
Nanometrics
Semiconductor Research Corporation
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5018310
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1. Spectroscopic Ellipsometry
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4. Electron-phonon interaction effects on the direct gap transitions of nanoscale Si films
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