Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry-Reference-Cited by-同舟云学术

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Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry

Published:2014-10-01 Issue:20 Volume:22 Page:24678
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Kumar Nitish,Petrik Peter,Ramanandan Gopika K P,El Gawhary Omar,Roy Sarathi,Pereira Silvania F,Coene Wim M J,Urbach H. Paul

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference27 articles.

1. Optically monitoring and controlling nanoscale topography during semiconductor etching

2. Technology and metrology of new electronic materials and devices

3. Mathematical concepts of optical superresolution

4. Overview Of Scatterometry Applications In High Volume Silicon Manufacturing

5. Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” [Thin Solid Films 455–456 (2004) 828–836]

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