General window correction method for ellipsometry measurements
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference11 articles.
1. Analyses and Corrections of Instrumental Errors in Ellipsometry
2. Measurement and Correction of First-Order Errors in Ellipsometry
3. Systematic and random errors in rotating-analyzer ellipsometry
4. A method to account for window birefringence effects on ellipsometry analysis
5. Systematic errors for a Mueller matrix dual rotating compensator ellipsometer
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