A method to account for window birefringence effects on ellipsometry analysis
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/26/i=11/a=029/pdf
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1. Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry
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4. Rough silicon surfaces studied by optical methods
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