Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries

Author:

Ohlídal I.1,Lukeš F.1

Affiliation:

1. a Department of Solid State Physics, Faculty of Science, Purkyně University, Brno, Czechoslovakia

Publisher

Informa UK Limited

Subject

Electronic, Optical and Magnetic Materials

Reference23 articles.

1. BENNETT , H. E. and BENNETT , J. M. 1967. Physics of Thin Films, Edited by: Hass , G. and Thun , R. E. 1New York: Academic Press.

2. Electrochemical Ellipsometric Study of Gold

3. LUKEŠ , F. NAVRÁTIL , K. SOMMER , I. and OHLÍDAL , I. 1971. Folia Facultatis Scientiarum Naturalium Universitatis Purkynianae Brunensis, XII, Physica 12, Opus 7 5

4. KRUGGER , J. 1964. Ellipsometry in the Measurement of Surfaces and Thin Films: Symposium Proceedings, Washington 1963, Misc. Pub. 256 Edited by: Passaglia , E. Stromberg , R. R. and Krueger , J. 31National Bureau of Standards.

5. Errors arising from surface roughness in ellipsometric measurement of the refractive index of a surface

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