Systematic and random errors in rotating-analyzer ellipsometry
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Ellipsometry with Imperfect Components Including Incoherent Effects*
2. Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*
3. General Treatment of the Effect of Cell Windows in Ellipsometry*
4. Measurement and Correction of First-Order Errors in Ellipsometry
5. The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers
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