40 nm thick photoresist-compatible plasmonic nanolithography using a bowtie aperture combined with a metal-insulator-metal structure
Author:
Funder
National Natural Science Foundation of China
Fundamental Research for Central Universities
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Surface plasmon resonant interference nanolithography technique
2. Surface plasmons on smooth surfaces
3. Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask
4. Nanolithography Using High Transmission Nanoscale Bowtie Apertures
5. Sub-Diffraction-Limited Optical Imaging with a Silver Superlens
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1. Forty-Nanometer Plasmonic Lithography Resolution with Two-Stage Bowtie Lens;Micromachines;2023-10-31
2. Plasmonic direct-writing lithography via high numerical aperture objectives;Optics Letters;2023-08-01
3. Fresnel diffraction lithography;Acta Physica Sinica;2023
4. Applications of optically and electrically driven nanoscale bowtie antennas;Opto-Electronic Science;2022
5. Metal-Insulator-Metal as a Biosensing Platfrom;Composite Materials: Applications in Engineering, Biomedicine and Food Science;2020
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