Anti-crosstalk absolute phase retrieval method for microscopic fringe projection profilometry using temporal frequency-division multiplexing

Abstract

In microscopic fringe projection profilometry (MFPP), the traditional absolute phase retrieval method using composite frequency fringe has the shortcomings of low accuracy and poor robustness due to mutual crosstalk of harmonic from the different channels of frequency-division multiplexing. In this study, an absolute phase retrieval method that avoids the inter-channel crosstalk is proposed. By introducing guard bands to accommodate the frequency channels corresponding to the second harmonic that dominate the high order harmonics, the aliasing between the second harmonic and the fundamental is eliminated. Consequently, phase maps without crosstalk can be demodulated using appropriate phase-shifting algorithms. The proposed method is well-suited for high-precision three-dimensional shape measurement scenarios in many fields such as integrated circuit manufacturing process control and micro-electro-mechanical system quality inspection. The experiment results demonstrate that the anti-crosstalk method is effective and can realize three-dimensional reconstruction for discontinuous planar surface and spherical surface.