Affiliation:
1. Changchun University of Science and Technology
2. Institute of Microelectronics of the Chinese Academy of Sciences
3. University of Chinese Academy of Sciences
Abstract
Multi-view microscopic fringe projection systems, which use high-resolution telecentric lenses and the Scheimpflug condition, face challenges in coinciding focal planes accurately, resulting in inconsistent measurements between views. In this Letter, we developed a sharpness evaluation function based on the total power of the line-spread function, which was subsequently used to generate a full-field sharpness distribution map. Then we employed the correlation between the sharpness map and orientation of the focal plane to precisely coincide the focal planes. Experimental results validate the proposed method and demonstrate its improved consistency in 3D reconstruction.
Funder
National Key Research and Development Program of China
Cited by
3 articles.
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