Microscopic fringe projection profilometry systems in Scheimpflug condition and performance comparison

Abstract

Abstract The high-frequency fringe images provided by magnifying lenses with low distortion render the microscopic fringe projection profilometry (MFPP) with better measurement accuracy. In order to extend the depth of field limited in the microscopic environment, the Scheimpflug principle is commonly used in both single-camera-based and multi-camera-based MFPP systems by increasing the mutual overlap range of different views in the object space. In this paper, to compare the performance of single-camera-based and dual-camera-based MFPP systems, we set up MFPP systems and performed 3D measurements of plates, standard balls, and some specifically designed samples. By analyzing the various factors affecting measurement accuracy and integrity, we verified and concluded that the dual-camera-based system wins in measurement accuracy while the single-camera-based system has better integrity, which may provide a reference for the system design in the implementation of industrial applications.