Affiliation:
1. Indian Institute of Technology
Abstract
Fast and accurate measurements of surface profiles is of vital importance in the field of non-destructive material testing. In the article, we propose the application of a robust phase retrieval method in digital holographic microscopy for nanoscale surface profile measurement. The proposed method is based on a parameter estimation strategy using a unitary transformation procedure applied over a windowed region of the numerically reconstructed wavefield signal. The proposed method is suitable for phase extraction even in the presence of noise and non-uniform amplitude variations. The applicability of the proposed method is demonstrated using both simulation and experimental results.
Funder
Department of Science and Technology, Ministry of Science and Technology, India
Cited by
1 articles.
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