Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters-Reference-Cited by-同舟云学术

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Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters

Published:2015-04-01 Issue:7 Volume:23 Page:9052
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Chen Benyong,Xu Bin,Yan Liping,Zhang Enzheng,Liu Yanna

Funder

National Natural Science Foundation of China (NSFC)

Program for Changjiang Scholars and Innovative Research Team in University (PCSIRT)

521 talents training program of Zhejiang Sci-Tech University

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference23 articles.

1. Performance evaluation of a new taut wire system for straightness measurement of machine tools

2. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide

3. Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

4. Impact of measurement procedure when error mapping and compensating a small CNC machine using a multilateration laser interferometer

5. A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors

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