Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage-Reference-Cited by-同舟云学术

Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

Published:2011-07 Issue:3 Volume:35 Page:424-430
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Yang Ping,Takamura Tomohiko,Takahashi Satoru,Takamasu Kiyoshi,Sato Osamu,Osawa Sonko,Takatsuji Toshiyuki

Publisher

Elsevier BV

Subject

General Engineering

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