Pin-plate micro assembly by integrating micro-EDM and Nd-YAG laser

Author:

Huang Jing-Dae,Kuo Chia-Lung

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference20 articles.

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2. Microsensors Principles and Applications;Gardner,1994

3. The LIGA technique and its potential for microsystems—a survey;Bacher;IEEE Transactions on Industrial Electronics,1995

4. Improvement of thickness uniformity in nickel electroforming for the LIGA process;Yang;International Journal of Machine Tools & Manufacture,2000

5. X-ray lathe: an X-ray lithographic exposure tool for nonplanar objects;Feinerman;Journal of Microelectromechanical Systems,1996

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