Author:
Yang Hsiharng,Kang Shung-Wen
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference13 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process);Becker;Microelectronic Engineering,1986
2. Fabrication of capacitive acceleration sensors by the LIGA technique;Burbaum;Sensors and Actuators A,1991
3. Development of pressure transducers utilizing deep X-ray lithography;Choi,1991
4. Polymer materials for microsystem technologies;Ruprecht;Microsystem Technology,1998
5. Fabrication of assembled micromechanical components via deep X-ray lithography;Guckel,1991
Cited by
67 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献