X-ray lathe: An X-ray lithographic exposure tool for nonplanar objects-Reference-Cited by-同舟云学术

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X-ray lathe: An X-ray lithographic exposure tool for nonplanar objects

Published:1996 Issue:4 Volume:5 Page:250-255
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Feinerman A.D.,Lajos R.E.,White V.,Denton D.D.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx4/84/11954/00546405.pdf?arnumber=546405

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparative study of the parameters affecting the performance of microchannels' heat exchangers: Latest advances review;Energy Science & Engineering;2023-08-03

2. Surface micro-texturing of metallic cylindrical surface with proximity rolling-exposure lithography and electrochemical micromachining;Applied Surface Science;2011-08

3. Fabrication of microcoils with narrow and high aspect ratio coil lines;Microsystem Technologies;2010-01-29

4. Novel Laser Scan Lithography onto Deep Inside Surfaces of Fine Pipes Using a Reflection Rod;Japanese Journal of Applied Physics;2009-04-20

5. Scan Projection Optical Lithography through a Slit onto Small Diameter Shafts;Journal of Photopolymer Science and Technology;2009

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