Novel Laser Scan Lithography onto Deep Inside Surfaces of Fine Pipes Using a Reflection Rod
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference12 articles.
1. Novel Projection Exposure System Using Gradient-Index Lens Array
2. Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist
3. Fabrication of micro-coils using laser scan lithography on copper pipes
4. Projection lithography onto overall cylindrical surfaces
5. Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of fine and high-density multithread spirals on inner surfaces of small-diameter pipes using laser scan lithography;Japanese Journal of Applied Physics;2014-05-23
2. Micro-fabrication of air-bearing grooves onto inner surfaces of fine copper pipes;Microelectronic Engineering;2013-10
3. Arbitrary Patterning onto Inner Surfaces of Small-Diameter Pipes Using Laser Scan Lithography;Journal of Photopolymer Science and Technology;2013
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