Optical characterization of AlN films: measurement of stress
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
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4. Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition;Journal of Materials Science;2009-11
5. Aluminium nitride–niobium multilayers and free-standing structures for MEMS;Thin Solid Films;2006-10
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