Nickel silicide thermal stability on polycrystalline and single crystalline silicon
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference24 articles.
1. Transition metal silicides in silicon technology
2. Silicides for VLSI Applications;Murarka,1983
3. Kinetics of formation of silicides: A review;d'Heurle;J. Mater. Res.,1986
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