Soft X-ray microscopy/lithography branch line at SSRL-Reference-Cited by-同舟云学术

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Soft X-ray microscopy/lithography branch line at SSRL

Published:1980-05 Issue:1-2 Volume:172 Page:387-391
ISSN:0029-554X
Container-title:Nuclear Instruments and Methods
language:en
Short-container-title:Nuclear Instruments and Methods

Author:

Warburton William K.

Publisher

Elsevier BV

Subject

General Medicine

Reference4 articles.

1. The optical principles of the diffraction of X-rays;James,1965

2. International tables for X-ray crystallography, Vol. III, Table 3.2.2C, p. 171.

3. H.W. Schnopper, Transmission gratings for X-ray lithography, in SSRL Report No. 79/02, Lithography/microscopy beam line design workshop.

4. T.W. Barbee, Jr. and D.L. Keith, Layered synthetic microstructures: Application as X-ray dispersive elements, ibid.

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel differential pump for synchrotron beamlines tests, models and applications;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-05

2. Combined microstructure x‐ray optics;Review of Scientific Instruments;1989-07

3. Synchrotron-based X-ray lithography at Stanford University;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1988-04

4. Molybdenum‐silicon multilayer monochromator for the extreme ultraviolet;Applied Physics Letters;1987-06-22

5. Combined Microstructure X-Ray Optics; Multilayer Diffraction Gratings;MRS Proceedings;1987

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