Abstract
ABSTRACTMultilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.
Publisher
Springer Science and Business Media LLC
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Metallic Multilayers;Materials Science and Technology;2006-09-15
2. Evaluation of Mo-Based Multilayer EUV Mirrors;Extreme Ultraviolet Lithography;1994
3. Thermal stability of Mo-based multilayer soft x-ray mirrors;Laser and Ion Beam Modification of Materials;1994
4. Metallic Multilayers;Concise Encyclopedia of Semiconducting Materials & Related Technologies;1992
5. On the diffraction properties of multilayer coated plane gratings;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-05