Synchrotron-based X-ray lithography at Stanford University-Reference-Cited by-同舟云学术

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Synchrotron-based X-ray lithography at Stanford University

Published:1988-04 Issue:1-3 Volume:266 Page:287-292
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Pan L.,King P.L.,Pianetta P.,Seligson D.,Barbee T.W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. Soft X-ray microscopy/lithography branch line at SSRL

2. these Proceedings 5th. Nat. Conf. on Synchrotron Radiation Instrumentation;Seligson,1988

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low Z total reflection X-ray fluorescence analysis — challenges and answers;Spectrochimica Acta Part B: Atomic Spectroscopy;1999-10

2. Synchrotron radiation-excited glancing incidence XRF for depth profile and thin-film analysis of light elements;X-RAY SPECTROM;1999

3. Synchrotron radiation-excited glancing incidence xrf for depth profile and thin-film analysis of light elements;X-Ray Spectrometry;1999-07

4. Diffuse reflectance of polymer mixtures subjected to broadband synchrotron radiation;Canadian Journal of Physics;1997-08-08

5. Total reflection X-ray fluorescence analysis of light elements with synchrotron radiation and special X-ray tubes;Spectrochimica Acta Part B: Atomic Spectroscopy;1997-07

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