Angular distribution measurements of sputtered atoms with characteristic X-ray emission
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference15 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
3. Theoretical aspects of cathode sputtering in the energy range of 5–25 keV
4. The angular distribution of scattered and sputtered 40-keV particles on polycrystalline targets
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3. The influence of surface topographic features on angular distribution of sputtered atoms;Vacuum;1995-03
4. The angular distribution of sputtered atoms and the influence of topographic features;Journal of Materials Science Letters;1994
5. Sputtering of Au, Csl and LiNbO3 by multiply charged Ar ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-07
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