The angular distribution of scattered and sputtered 40-keV particles on polycrystalline targets

Author:

Formann E.,Viehböck F. P.,Wotke H.

Abstract

Based on the hard-sphere potential approximation, angular distributions of scattered particles at different mass ratios M1:M2 were calculated. The results were compared with experiments carried out with the following atoms:[Formula: see text]The sputtered particles from the target as well as from the incident-ion beam were collected on graphite rods and measured by either activation analysis or a radioactive tracer technique.

Publisher

Canadian Science Publishing

Subject

General Physics and Astronomy

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Angular, energy, and mass distribution of sputtered particles;Topics in Applied Physics;1991

2. Ejection of fast recoil atoms from solids under ion bombardment (medium-energy ion scattering by solid surfaces—part III;Radiation Effects and Defects in Solids;1989-11

3. Computer studies of statistical distribution functions of particles moving in ion-beam-induced collision cascades within amorphous solids;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-04

4. Anisotropy of collision cascades by light-ion irradiation of zirconium;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1984-03

5. Angular distribution and sputtering yield of Al and Al2O3 during 40 key argon ion bombardment;Vacuum;1982-01

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