Low energy ion induced damage in silicon at 50 K

Author:

Thompson D.A.,Walker R.S.

Publisher

Elsevier BV

Subject

General Medicine

Reference12 articles.

Cited by 40 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Amorphization of crystalline Si due to heavy and light ion irradiation;Journal of Applied Physics;2009-08-15

2. Molecular effect in semiconductors under heavy-ion bombardment: Quantitative approach based on the concept of nonlinear displacement spikes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-09

3. Damage buildup in Si under bombardment with MeV heavy atomic and molecular ions;Journal of Applied Physics;2001-10-15

4. Ballistic self-annealing during ion implantation;Journal of Physics D: Applied Physics;2001-10-09

5. MeV Al + and Al 2 + ions implantation in Si(100): surface roughness and defects in the bulk;Applied Physics A: Materials Science & Processing;2000-04-01

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