Theory of charge states in sputtering
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference16 articles.
1. Experimental and theoretical approaches to the ionization process in secondary-ion emission
2. The sputtering process and sputtered ion emission
3. Quantitative analysis of low alloy steels by secondary ion mass spectrometry
4. The theoretical and experimental study of the ionization processes during the low energy ion sputtering
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