Mass and energy distribution of negatively and positively charged small cluster ions sputtered from GaAs(100) by 150 keV Ar + bombardment-Reference-Cited by-同舟云学术

Mass and energy distribution of negatively and positively charged small cluster ions sputtered from GaAs(100) by 150 keV Ar + bombardment

Published:2017-09 Issue: Volume:407 Page:132-140
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Angelin E.J.,Hippler R.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference56 articles.

1. R. Hippler, In: Low Temperature Plasmas (R. Hippler, H. Kersten, M. Schmidt, K.H. Schoenbach, Eds.), Wiley-VCH Verlag Weinheim, (2008) p. 71.

2. K. Ellmer, In: Low Temperature Plasmas (R. Hippler, H. Kersten, M. Schmidt, K.H. Schoenbach, Eds.), Wiley-VCH Verlag Weinheim, (2008) p. 675.

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