Distortion of depth profiles during ion bombardment II. Mixing mechanisms
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference22 articles.
1. Distortion of depth profiles during sputtering
2. Ion beam sputtering - the effect of incident ion energy on atomic mixing in subsurface layers
3. Implications in the use of secondary ion mass spectrometry to investigate impurity concentration profiles in solids
4. Ion-beam-induced migration and its effect on concentration profiles
5. Ion‐beam‐induced atomic mixing
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