Distortion of depth profiles during sputtering-Reference-Cited by-同舟云学术

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Distortion of depth profiles during sputtering

Published:1980-01 Issue:1-3 Volume:168 Page:389-394
ISSN:0029-554X
Container-title:Nuclear Instruments and Methods
language:en
Short-container-title:Nuclear Instruments and Methods

Author:

Sigmund P.,Gras-Marti A.

Publisher

Elsevier BV

Subject

General Medicine

Reference23 articles.

1. Super ranges of fast ions in copper single crystals

2. Sputtering and depth-distribution phenomena in KCl, Al2O3, and TiO2

3. Sputtering in the surface analysis of solids: A discussion of some problems

4. Physics of ionized gases;Whitton,1978

5. The depth resolution of sputter profiling

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