Ion‐beam‐induced atomic mixing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.324179
Reference14 articles.
1. Ion beam sputtering - the effect of incident ion energy on atomic mixing in subsurface layers
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4. Selective X-ray generation by heavy ions (Part 2) measurement of the concentration distribution of ion-implanted antimony in silicon by the use of selective heavy ion X-ray excitation
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