A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example

Author:

Yan Yan,Wang Haiming,Zou Qingze

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Reference24 articles.

1. Bristow, D., & Alleyne, A. A manufacturing system for microscale robotic deposition. In Proceedings of American control conference. (pp. 2620–2625). June 2003.

2. Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system;de Roover;International Journal of Control,2000

3. A survey of control issues in nanopositioning;Devasia;IEEE Transactions on Control Systems Technology,2007

4. Fourier analysis and applications: filtering, numerical computation, wavelets;Gasquet,1999

5. Iterative learning control for nonlinear nonminimum phase plants;Ghosh;ASME Journal of Dynamic Systems, Measurement and Control,2001

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