Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system
Author:
Affiliation:
1. a SC Solutions Inc. , 3211 Scot Boulevard, Santa Clara, CA, 95054, USA
2. b Mech. Eng. Systems and Control Group , Delft University of Technology , Mekelweg 2, Delft, 2628, CD, The Netherlands
Publisher
Informa UK Limited
Subject
Computer Science Applications,Control and Systems Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/002071700405923
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