Tunable synthesis, characterization, and CMP performance of dendritic mesoporous silica nanospheres as functionalized abrasives-Reference-Cited by-同舟云学术

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Tunable synthesis, characterization, and CMP performance of dendritic mesoporous silica nanospheres as functionalized abrasives

Published:2022-04 Issue: Volume:638 Page:128322
ISSN:0927-7757
Container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects
language:en
Short-container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects

Author:

Chen Ailian,Wang Shirui,Cai Wenjie,Mu Zhaoyu,Chen Yang

Funder

National Natural Science Foundation of China

Priority Academic Program Development of Jiangsu Higher Education Institutions

Publisher

Elsevier BV

Subject

Colloid and Surface Chemistry

Reference55 articles.

1. Recent developments and applications of chemical mechanical polishing;Zhong;Int. J. Adv. Manuf. Tech.,2020

2. Design of composite abrasives and substrate materials for chemical mechanical polishing applications;Meng;Appl. Nanosci.,2020

3. A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers;Zhang;Sci. Rep.,2016

4. A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry;Zhang;Appl. Surf. Sci.,2018

5. Environment friendly chemical mechanical polishing of copper;Zhang;Appl. Surf. Sci. 467-,2019

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1. Development of Ce/Cu co-doped dendritic mesoporous silica nanoparticles (DMSNs) as novel abrasive systems toward high-performance chemical mechanical polishing;Ceramics International;2024-09

2. Understanding and mitigating temperature-induced agglomeration in silica-based chemical mechanical planarization (CMP) slurry storage;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2024-06

3. Angstrom surface on copper induced by novel green chemical mechanical polishing using ceria and silica composite abrasives;Applied Surface Science;2023-12

4. Polymer coated γ-aminopropyltriethoxysilane-modified α-alumina non-spherical nanocomposite abrasives and their chemical mechanical polishing behavior on glass-ceramic substrate;Iranian Polymer Journal;2023-11-24

5. Dendritic mesoporous silica nanoparticles for enzyme immobilization;Green Chemical Engineering;2023-07

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