Studies on the performance characteristics and improvements of the piezoelectrically-driven micro gas compressors-Reference-Cited by-同舟云学术

Studies on the performance characteristics and improvements of the piezoelectrically-driven micro gas compressors

Published:2009-11 Issue:11 Volume:86 Page:2297-2304
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Yoon Jae Sung,Choi Jong Won,Kim Min Soo,Yoo Yeong-Eun,Choi Doo-Sun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Micro technology in heat pumping systems

2. LIGA micropump for gases and liquids

3. Robust design of gas and liquid micropumps

4. A plastic micropump constructed with conventional techniques and materials

5. Piezoelectric micropump with three valves working peristaltically

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