Author:
Böhm Sebastian,Olthuis Wouter,Bergveld Piet
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Piezoelectric micropump with three valves working peristaltically;Smits;Sensors and Actuators A,1990
2. F.C.M. van de Pol, A Pump Based on Micro-Engineering Techniques, Thesis, Univ. of Twente, The Netherlands, 1989.
3. A piezoelectric micropump based on micromachining of silicon;van Lintel;Sensors and Actuators A,1988
4. A thermopneumatic micropump based on micro-engineering techniques;van de Pol;Sensors and Actuators A,1990
5. S. Nakagawa, S. Shoji, M. Esashi, A micro chemical analyzing system integrated on a silicon wafer, Proc. IEEE-MEMS, USA, 1990, 89–94.
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