Author:
Van de Pol F.C.M.,Van Lintel H.T.G.,Elwenspoek M.,Fluitman J.H.J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices;van de Pol;Sensors and Actuators,1989
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