Author:
Rapp R.,Schomburg W.K.,Maas D.,Schulz J.,Stark W.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. A piezoelectric micropump based on micromachining of silicon;van Lintel;Sensors and Actuators,1988
2. A study of a high-pressure micropump for integrated chemical analysing systems;Shoji;Sensors and actuators A,1992
3. Electrohydrodynamische Mikropumpen;Richter;VDI-Berichte,1992
4. Design and simulation of membrane pump components;Urban,1991
5. Positioniertes Verkleben von LIGA-Mikrostrukturen am Beispiel einer mikropumpe;Keller;Proc. Drittes Symp. Mikrosystemtechnik, Regensburg, Germany,1993
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