Author:
Hong Jang-Hyuk,Moon Tae-Hyoung,Myoung Jae-Min
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. H.S. Momose, M. Ono, T. Yoshitomi, T. Ohguro, S.-I. Nakamura, M. Saito, H. Iwai, IEDM Technical Digest, 1994, p. 593
2. Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics
3. A. Chin, Y.H. Wu, S.B. Chen, C.C. Liao, W.J. Chen, VLSI Symposium Technical Digest, 2000, p. 16
4. Stable zirconium silicate gate dielectrics deposited directly on silicon
5. Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献