Author:
Schmidt M.,Stefani A.,Gottlob H.D.B.,Kurz H.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. International Technology Roadmap for Semiconductors, ITRS 2005 Edition.
2. High temperature stability of lanthanum silicate dielectric on Si (001)
3. Thermal stability and diffusion in gadolinium silicate gate dielectric films
4. Gd silicate: A high-k dielectric compatible with high temperature annealing
5. H.G.B. Gottlob, M. Schmidt, A. Stefani, M.C. Lemme, H. Kurz, I.Z. Mitrovic, W.M. Davey, S. Hall, M. Werner, P.R. Chalker, K. Cherkaoui, P.K. Hurley, J. Piscator, O. Engström and S.B. Newcomb, INFOS, Microelectron. Eng. 86 (2009) 1642.
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