Author:
Kovalgin Alexey,Hof Andre,Schmitz Jurriaan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. General Relationship for the Thermal Oxidation of Silicon;Deal;Journal of Applied Physics,1965
2. The Modelling of Silicon Oxidation from 1×10−5 to 20 Atmospheres;Reisman;Journal of Electronic Materials,1987
3. Silicon Oxidation and Fixed Oxide Charge;Wolters;Journal of the Electrochemical Society,1992
4. Electrolysis of SiO2 on Silicon;Jorgensen;Journal of Chemical Physics,1968
5. The Model of Growth Kinetics of Very Thin Thermal Silicon Oxide Layer;Beck;Electron Technology,1988
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献