Strain characterization of strained silicon on insulator wafers-Reference-Cited by-同舟云学术

Strain characterization of strained silicon on insulator wafers

Published:2004-04 Issue:1-4 Volume:72 Page:367-373
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Paillard V,Ghyselen B,Aulnette C,Osternaud B,Daval N,Fournel F,Moriceau H,Ernst T,Hartmann J.M,Lagahe-Blanchard C,Pocas S,Leduc P,Vincent L,Cristiano F,Campidelli Y,Kermarrec O,Besson P,Morand Y

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

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