Author:
Al-Halhouli A.T.,Kampen I.,Krah T.,Büttgenbach S.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
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2. Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
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4. Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts
5. M. Hopcropft, T. Kramer, G. Kim, K. Takashima, Y. Higo, D. Moore, J. Brugger, in: ATEM’03, JSME-MMD, 2003.
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