Author:
Hahmann Peter,Fortagne Olaf
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference43 articles.
1. J.P. Beasley et al., in: Proc. Eighth Int. Conf. Electron and Ion Beam Sci. Technol., 1978, p. 98.
2. Accuracy requirements for adjusting variable‐shaped beam systems for the production of submicron patterns
3. D.A. Buck et al., in: Proc. Eastern Joint Computer Conf., 1959, pp. 55–59.
4. Über die Wirkungsweise der Konzentrierungsspule bei der Braunschen Röhre
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献