Author:
Besling Wim F.A.,Ignacimouttou Marie-Laurence,Humbert Aurelie,Mellier Maxime,Torres Joaquin
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. W.F.A. Besling, D. Galpin, M. Mellier, L. Svedberg, T. Mandrekar, F. Wu, S. Guggilla, S. Van, M. Ignacimouttou, J. Torres, in: AMC conference 2003, G.W. Ray, T. Smy, T.Ohta, & M. Tsujimura (Eds.), in: Conference Proceedings AMC XIX, MRS 2004, p. 737
2. Enhancement of ALCVD™ TiN growth on Si–O–C and α-SiC:H films by O2-based plasma treatments
3. A. Satta, S.H. Brongersma, J. Schuhmacher, T. Conard, W. Besling,G. Beyer, K. Maex, A. Vantomme, O. Kilpela, H. Sprey, M.M. Viitanen, H.H. Brongersma, in: Proceedings of the 3rd International Conference on Microelectronics and Interfaces, AVS, 2002, p. 56
4. W.F.A. Besling, A. Satta, J. Schuhmacher, G. Beyer, K. Maex, O. Kilpela, H. Sprey, in: Proceedings of the 3rd International Conference on Microelectronics and Interfaces, AVS, 2002, p. 52
5. W. Besling, A. Satta, J. Schuhmacher, T. Abell, V. Sutcliffe, A. Hoyas, G. Beyer, D. Gravesteijn, K. Maex, IITC 2002 Conference June 6–8 2002, IEEE 2002, pp. 288–291
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