Author:
Randall J.N.,Von Ehr J.R.,Ballard J.B.,Owen J.H.G.,Fuchs E.
Funder
Research Contract from DARPA
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Woolley, Julian Stirling, Adrian Radocea, Natalio Krasnogor, and Philip Moriarty;Richard;Appl. Phys. Lett.,2011
2. Atomic precision lithography on Si
3. Atomic precision patterning on Si: An opportunity for a digitized process
4. Patterned atomic layer epitaxy of Si/Si(001):H
5. J. N. Randall, J. Ballard, James R. Von Ehr, J. Alexander Presented at Micro Nano Engineering Conference, Genoa, Italy, Sept, 2010.
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