Atomic precision patterning on Si: An opportunity for a digitized process

Author:

Randall J.N.,Ballard J.B.,Lyding J.W.,Schmucker S.,Von Ehr J.R.,Saini R.,Xu H.,Ding Y.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Atomic-Scale Templates Patterned by Ultrahigh Vacuum Scanning Tunneling Microscopy on Silicon

2. .

3. Quantum lithography

4. Wen-Di Li, Xiaogan Liang, Stephen Y. Chou, Negative tone quantum lithography at 200-nm pitch nanoimprinted blanks, Presented at the International Conference for Electron, Ion, and Photon Beam Technology and Nanofabrication, May 26–29, 2009 Marco Island Florida.

5. Private Communication with Joseph Lyding, University of Illinois.

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