Funder
Huahong Grace Semiconductor Manufacturing Corporation
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Modification of discharge sequences to control the random dispersion of flake particles during wafer etching;Journal of Vacuum Science & Technology B;2023-11-14
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